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For the characteristics of strong dynamic, severe coupling and multi-process constraints of the complex equipment support, this paper established a hierarchical flow analysis model based on Petri net. First, the hierarchical structure was analyzed:the coloring time constraints Petri net was used to build the hierarchical flow model containing the support resources such as the support personnel, the support equipments and the support space. Then, the statistics algorithm of the time parameters of the flow was introduced via the hierarchical analysis method. Lastly, an example was taken in a support process of certain equipment system. By contrast with the results of ExSpect software and Monte Carlo simulation, the effectiveness of the algorithm was verified.