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To meet the requirements of testability verification and evaluation of equipment integrated circuit, break through the difficult fault injection, cost and time limits, it carried out research and application on equipment fault injection technology of semi-invasive laser probe. Firstly, the equipment traditional physical fault injection technology is studied, the feasibility and mechanism of pulsed laser transient fault injection are analyzed; Secondly, the energy transfer model of pulsed laser transient fault injection was established and the calculation method of pulsed laser energy based on linear transmission is presented; Finally, the experimental verification was carried out. The test shows that the method successfully realizes the accurate reproduction of typical fault modes, it can precisely locate the weak spot inside the chip to guide the optimal design of equipment.