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基于激光干涉儀對天文底片掃描儀氣浮式運動(dòng)平臺的性能測試
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中國科學(xué)院上海天文臺

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國家自然科學(xué)基金(12073062);國家重點(diǎn)研發(fā)計劃政府間國際科技創(chuàng )新合作專(zhuān)項(2021YFE0103400)資助.


Performance test of the air-bearing motion platform applied by the astronomical plates digitizer based on the laser interferometer
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    摘要:

    為推進(jìn)國際天文底片數字化工作,上海天文臺正在開(kāi)展高精度天文底片專(zhuān)用掃描儀的研制。兩軸線(xiàn)性運動(dòng)平臺是高精度天文底片掃描儀的核心部件,需要對其各項參數進(jìn)行標準化測試,以獲取其對天文底片數字化精度的直接影響。基于激光干涉測量原理,使用RENISHAW XL80激光干涉儀搭建測量光路,對正在研制的天文底片掃描儀所用氣浮式運動(dòng)平臺關(guān)鍵性能進(jìn)行了測試。結果表明,在350mm×350mm工作范圍內,氣浮式運動(dòng)平臺載物臺的定位重復精度優(yōu)于0.025μm,直線(xiàn)度和平面度優(yōu)于0.3μm,俯仰角和偏擺角誤差小于0.3″。該平臺滿(mǎn)足高精度天文底片掃描儀設備的研制需求,測試結果不僅可為掃描儀設備的整體性能評估提供參考,也可為后續的位置系統差補償提供依據。

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    In order to promote the international digitization of astronomical plates, Shanghai Observatory is developing a special high-precision digitizer for astronomical plates. The two-axis linear motion platform is the core component of the high-precision astronomical plates digitizer, and its parameters need to be tested to obtain its direct influence on the accuracy of digitization of astronomical plates. Based on the principle of laser interferometry, the optical path for measurement is built by using RENISHAW XL80 laser interferometer. The key performance of the air-bearing platform for the astronomical plate digitizer which is being developed by Shanghai Astronomical Observatory is tested. Results show that the positioning repeatability of the stage fixed on the air-bearing motion platform is better than 0.025μm, the straightness and flatness are both better than 0.3μm, and the attitude errors including pitch and yaw are less than 0.3″. The air-bearing motion platform can meet the development requirement for high-precision digitization equipment to digitize astronomical plates. The results can offer a reference for the overall performance evaluation of the digitizer and provide a basis subsequently for compensating systematic positioning error.

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王亮亮,商正君,鄭立新,楊美婷,楊靜,趙建海,于涌.基于激光干涉儀對天文底片掃描儀氣浮式運動(dòng)平臺的性能測試計算機測量與控制[J].,2021,29(12):79-83.

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歷史
  • 收稿日期:2021-07-02
  • 最后修改日期:2021-08-05
  • 錄用日期:2021-08-06
  • 在線(xiàn)發(fā)布日期: 2021-12-24
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